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Institution:机械工程学院
Title of Paper:Planar motion measurement of a compliant micro stage: an enhanced microscopic vision approach
Journal:《IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT》
First Author:苏高照
Document Code:86622A5895F4408BA9CB9CF1AB528E3B
Issue:5
Number of Words:7
Translation or Not:No
Date of Publication:2020-04
Release Time:2021-10-08