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Institution:机械工程学院
Title of Paper:Planar Motion Measurement of a Compliant Micro Stage: An Enhanced Microscopic Vision Approach
Journal:《IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT》
First Author:苏高照
Document Code:824E62A851774C3DA342B788B5CEFAEA
Volume:69
Issue:5
Number of Words:5
Translation or Not:No
Date of Publication:2020-05
Release Time:2022-11-17