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Integrated Ultrahigh-Sensitivity Temperature Sensor Based on Asymmetric Mach-Zehnder Interferometer and Stress Deformation of Aluminum-SiO2

Release time:2023-10-28|Hits:

Affiliation of Author(s):信息科学与工程学院

Journal:《IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT》

Key Words:Mach-Zehnder interferometer;optical sensors;photonic integrated circuits;temperature sensor

First Author:尹锐

Document Code:1478209176231481346

Volume:70

Number of Words:3000

Translation or Not:no

Date of Publication:2021-01-01

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