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Integrated Ultrahigh-Sensitivity Temperature Sensor Based on Asymmetric Mach-Zehnder Interferometer and Stress Deformation of Aluminum-SiO2
Release Time:2023-10-28
  • Institution:
    信息科学与工程学院
  • Journal:
    《IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT》
  • Key Words:
    Mach-Zehnder interferometer;optical sensors;photonic integrated circuits;temperature sensor
  • First Author:
    尹锐
  • Document Code:
    1478209176231481346
  • Volume:
    70
  • Number of Words:
    3000
  • Translation or Not:
    No
  • Date of Publication:
    2021-01
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