Title : Anodic etching of GaN based film with a strong phase-separated InGaN/GaN layer: Mechanism and properties

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Affiliation of Author(s):微电子学院

Title of Paper:Anodic etching of GaN based film with a strong phase-separated InGaN/GaN layer: Mechanism and properties

Journal:Applied surface science

All the Authors:Jianqiang Liu,Ma Jin

First Author:xiaohongdi

Indexed by:Applied Research

Document Code:lw-185722

Volume:387

Page Number:406

Translation or Not:no

Date of Publication:2016-07-13