Title : Ta-doped epitaxial beta-Ga2O3 films deposited on SrTiO3(100) substrates by MOCVD

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Affiliation of Author(s):微电子学院

Title of Paper:Ta-doped epitaxial beta-Ga2O3 films deposited on SrTiO3(100) substrates by MOCVD

Journal:Materials Science in Semiconductor Processing

First Author:王迪

Indexed by:Unit Twenty Basic Research

Document Code:F3B06BABF3F4429293F2971F17DBB39E

Volume:128

Translation or Not:no

Date of Publication:2021-06-15