Project Name:硅基微阵列芯片的表面差分功能化工艺研究
Institution:机械工程学院
Leading Scientist:满佳
Nature of Project:横向
Project Number:C4DD4C5F529677F7E053BE07C2CA0610
Date of Project Approval:2021-06-03
Scheduled Completion Time:2022-05-31
Date of Project Completion:2022-05-31
Date of Project Initiation:2021-06-03
Release Time:2022-05-27