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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

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Affiliation of Author(s):集成电路学院
Journal:Journal of Electronic Materials
All the Authors:xiaohongdi,maohongzhi,luancaina,Jianqiang Liu,Ma Jin
First Author:xiaohongdi
Document Code:DBE67F01DB544898847C76A91BEC549C
Volume:48
Page Number:3036
Translation or Not:no
Date of Publication:2019-02-01
Date of Publication:2019-02-01

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