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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

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  • Affiliation of Author(s):集成电路学院

  • Journal:Journal of ELECTRONIC MATERIALS

  • All the Authors:maohongzhi,luancaina,Jianqiang Liu,Ma Jin,xiaohongdi

  • First Author:杨小坤

  • Document Code:9600585BF2564969BC16220CA429D8C2

  • Volume:48

  • Issue:5

  • Page Number:3036

  • Number of Words:3

  • Translation or Not:no

  • Date of Publication:2019-05-01

  • Date of Publication:2019-05-01
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