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    Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

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    • Institution:集成电路学院

    • Title of Paper:Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

    • Journal:Journal of ELECTRONIC MATERIALS

    • First Author:杨小坤

    • All the Authors:肖洪地,马瑾,Jianqiang Liu,栾彩娜,毛宏志

    • Document Code:9600585BF2564969BC16220CA429D8C2

    • Volume:48

    • Issue:5

    • Page Number:3036

    • Number of Words:3

    • Translation or Not:No

    • Date of Publication:2019-05

    • Release Time:2020-03-20
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