Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
发布时间：2019-06-06 点击数：
所属单位：微电子学院
论文名称：Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
发表刊物：Journal of Electronic Materials
第一作者：肖洪地
全部作者：毛宏志,栾彩娜,刘建强,马瑾
论文类型：基础研究
论文编号：DBE67F01DB544898847C76A91BEC549C
卷号：48
页面范围：3036
是否译文：否
发表时间：2019-02