Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
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所属单位：微电子学院
发表刊物：Journal of Electronic Materials
全部作者：毛宏志,栾彩娜,刘建强,马瑾
第一作者：肖洪地
论文类型：基础研究
论文编号：DBE67F01DB544898847C76A91BEC549C
卷号：48
页面范围：3036
是否译文：否
发表时间：2019-02-01
发表时间：2019-02-01
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