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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

发布时间：2019-10-25 点击数：

所属单位：集成电路学院

论文名称：Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

发表刊物：Journal of Electronic Materials

第一作者：肖洪地

全部作者：马瑾,毛宏志,栾彩娜,刘建强,肖洪地

论文编号：DBE67F01DB544898847C76A91BEC549C

卷号：48

页面范围：3036

是否译文：否

发表时间：2019-02

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毛宏志 (高级实验师)

Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM