Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
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所属单位：集成电路学院
发表刊物：Journal of ELECTRONIC MATERIALS
全部作者：毛宏志,栾彩娜,刘建强,马瑾,肖洪地
第一作者：杨小坤
论文编号：9600585BF2564969BC16220CA429D8C2
卷号：48
期号：5
页面范围：3036
字数：3
是否译文：否
发表时间：2019-05-01
发表时间：2019-05-01
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