Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
发布时间：2020-03-20 点击数：
所属单位：集成电路学院
论文名称：Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
发表刊物：Journal of ELECTRONIC MATERIALS
第一作者：杨小坤
全部作者：肖洪地,马瑾,刘建强,栾彩娜,毛宏志
论文编号：9600585BF2564969BC16220CA429D8C2
卷号：48
期号：5
页面范围：3036
字数：3
是否译文：否
发表时间：2019-05
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