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    离子束溅射双室联合系统

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    • Project Name:离子束溅射双室联合系统

    • Institution:材料科学与工程学院

    • Leading Scientist:MIN Guanghui

    • Supported by:The Chinese Academy of Sciences Shenyang Instrument Research and Development Center Co., Ltd.

    • Nature of Project:Ion Beam Sputtering Dual-Chamber Integrated System

    • Project Participants:MIN Guanghui

    • Project Number:kyxm-35095

    • Project Approval Number:11370603

    • Date of Project Approval:2006-03-01

    • Scheduled Completion Time:2007-03-01

    • Date of Project Completion:2007-03-01

    • Date of Project Initiation:2006-03-01

    • Release Time:2019-04-17
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