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离子束溅射双室联合系统

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  • Affiliation of Participant(s):材料科学与工程学院

  • Leading Scientist:MIN Guanghui

  • Supported by:中科院沈阳仪器研制中心有限公司

  • Nature of Project:离子束溅射双室联合系统

  • Project Participants:MIN Guanghui

  • Project Number:kyxm-35095

  • Project Approval Number:11370603

  • Date of Project Approval:2006-03-01

  • Date of Project Initiation:2006-03-01

  • Scheduled completion time:2007-03-01

  • Date of Project Completion:2007-03-01

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