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    反应磁控溅射法制备ZnO/Al(O)/ZnO薄膜的光学和电学性能

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    • Institution:材料科学与工程学院

    • Title of Paper:反应磁控溅射法制备ZnO/Al(O)/ZnO薄膜的光学和电学性能

    • Journal:机械工程材料

    • Key Words:反应磁控溅射;;ZnO/Al(O)/ZnO薄膜;;氧掺杂;;氧气流量

    • First Author:邢士龙

    • All the Authors:MIN Guanghui

    • Document Code:80032

    • Issue:08

    • Translation or Not:No

    • Date of Publication:2018-08

    • Release Time:2019-11-24
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