中文

反应磁控溅射法制备ZnO/Al(O)/ZnO薄膜的光学和电学性能

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  • Affiliation of Author(s):材料科学与工程学院

  • Journal:机械工程材料

  • Key Words:反应磁控溅射;;ZnO/Al(O)/ZnO薄膜;;氧掺杂;;氧气流量

  • All the Authors:MIN Guanghui

  • First Author:邢士龙

  • Document Code:80032

  • Issue:08

  • Translation or Not:no

  • Date of Publication:2018-08-20

  • Date of Publication:2018-08-20

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