Depth detection and fabrication of porous silicon without the stress
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Institution:微电子学院
Title of Paper:Depth detection and fabrication of porous silicon without the stress
Journal:Applied Surface Science
First Author:曹得重
All the Authors:刘向东,马瑾,肖洪地,Helen
Document Code:lw-198329
Volume:362
Page Number:557
Translation or Not:No
Date of Publication:2016-02
Release Time:2019-10-24