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Depth detection and fabrication of porous silicon without the stress

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Affiliation of Author(s):微电子学院

Journal:Applied Surface Science

All the Authors:liuxiangdong,Ma Jin,xiaohongdi,Helen

First Author:曹得重

Indexed by:Applied Research

Document Code:lw-198329

Volume:362

Page Number:557

Translation or Not:no

Date of Publication:2016-02-15

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