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    Intelligent identification of material removal behavior during scratching of 4H-SiC based on acoustic emission sensing and unsupervised deep learning

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    • Institution:机械工程学院

    • Title of Paper:Intelligent identification of material removal behavior during scratching of 4H-SiC based on acoustic emission sensing and unsupervised deep learning

    • Journal:Materials Science in Semiconductor Processing

    • First Author:张瑞豪

    • Document Code:949D5A5A5FEA406C8F6DFA8DDCBE2689

    • Volume:190

    • Issue:1

    • Page Number:109358

    • Number of Words:4

    • Translation or Not:No

    • Date of Publication:2025-05

    • Release Time:2025-10-06
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