Institution:微电子学院
Title of Paper:Low-temperature fabrication of HfAlO alloy dielectric using atomic-layer deposition and its application in a low-power device
Journal:JOURNAL OF ALLOYS AND COMPOUNDS Journal
First Author:马鹏飞
All the Authors:辛倩,Li Yuxiang,Song A M
Document Code:493ECA4D2F7E4A1A8A8F23A9ED815A53
Volume:792
Page Number:543
Translation or Not:No
Date of Publication:2019-07
Release Time:2019-06-06
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Alma Mater : 山东大学
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 集成电路学院
Faculty/School : School of Integrated Circuits,Shandong University
Business Address : 软件园校区
Email :
Email :
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