Affiliation of Author(s): : 微电子学院
Title of Paper: : Low-temperature fabrication of HfAlO alloy dielectric using atomic-layer deposition and its application in a low-power device
Journal: : JOURNAL OF ALLOYS AND COMPOUNDS Journal
All the Authors: : xinqian,Li Yuxiang,Song A M
First Author: : 马鹏飞
Indexed by: : Unit Twenty Basic Research
Document Code: : 493ECA4D2F7E4A1A8A8F23A9ED815A53
Volume: : 792
Page Number: : 543
Translation or Not: : no
Date of Publication: : 2019-07-05
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Alma Mater : 山东大学
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 集成电路学院
Business Address : 软件园校区
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