Affiliation of Author(s): : 微电子学院

Title of Paper: : A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

Journal: : IEEE Transactions on Nanotechnology

All the Authors: : Yiming Wang,wangqingpu,xinqian,hanlin,Song A M

First Author: : 王汉斌

Indexed by: : Unit Twenty Basic Research

Document Code: : E56E2B7ED1104702BAEB516FA27F194D

Volume: : 16

Issue: : 2

Page Number: : 290

Translation or Not: : no

Date of Publication: : 2017-03-01