Title:一种减少蒸发镀膜设备中衬底或其上的材料受烘烤升温影响的装置及应用
Institution:物理学院
Application Number:2015110256428
Number of Inventors:2
Service Invention or Not:No
Application Date:2015-12-30
Release Time:2019-01-26
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Alma Mater : 山东大学
Education Level : Postgraduate (Doctoral)
Degree : Doctor
Status : Employed
School/Department : 集成电路学院
Faculty/School : School of Integrated Circuits,Shandong University
Business Address : 软件园校区
Email :
Email :
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