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基于梳状栅格的MOEMS无线振动传感器及其工作方法
Release Time:2019-04-15| Hits:
Title:基于梳状栅格的MOEMS无线振动传感器及其工作方法
Institution:控制科学与工程学院
Type of Patent:Invent
Application Number:201710034536.9
Number of Inventors:5
Service Invention or Not:No
Application Date:2017-01-18
Publication Date:2023-08-18
Authorization Date:2023-08-18
Release Time:2019-04-15
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