Affiliation of Author(s):微电子学院
Journal:Semiconductor Science and Technology
All the Authors:Xutang Tao,Song A M,xumingsheng,Wenxiang Mu,Zhitai Jia,Wang Xinyu,xingongming
First Author:辛倩
Indexed by:Unit Twenty Basic Research
Document Code:343681EE28154666B317A53CC22C80CE
Translation or Not:no
Date of Publication:2019-06-06