Rapid epitaxy of 2-inch and high-quality α-Ga2O3 films by Mist-CVD method

Release time:2023-05-18|Hits:

Affiliation of Author(s):新一代半导体材料研究院

Journal:Journal of Semiconductors

First Author:王晓杰

Document Code:131FF0B9E69B46ADB8D020C55131783B

Issue:44

Number of Words:7

Translation or Not:no

Date of Publication:2023-04-03