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Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon

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Title of Paper:Modeling and simulation of phase transformation and crack formation during scribing of mono-crystalline silicon

Journal:Int. J. Mech. Sci.

Volume:175

Page Number:105527

Translation or Not:No

Date of Publication:2020-06

Included Journals:SCI

Release Time:2021-01-27

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Effect of speed on material removal behavior in scribing of monocrystalline silicon

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