MOEMS二分量加速度传感器、测量系统及工作方法

Release time:2022-09-15|Hits:

Affilication of Author(s):控制科学与工程学院

Type of Patent:发明

Application Number:201910865799.3

Number of Inventors:5

Service Invention or Not:no

Application Date:2019-09-12

Publication Date:2022-02-08

Authorization Date:2022-02-08