The properties of ion-implanted LiNbO3 waveguides measured by the RBS and ion beam etching stripping methods

Release time:2022-10-21|Hits:

Affiliation of Author(s):前沿交叉科学青岛研究院

Journal:OPTICAL MATERIALS

Key Words:Ion implantation;Damage profile;LiNbO3;RBS

First Author:赵金花

Document Code:1395252892088143873

Volume:33

Issue:8

Page Number:1357-1361

Translation or Not:no

Date of Publication:2011-06-01