Paper Publications
Title of Award : Characterization and Analysis of Dlc Films with Different Thickness Deposited by Rf Magnetron Pecvd
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Institution:材料科学与工程学院
Title of Paper:Characterization and Analysis of Dlc Films with Different Thickness Deposited by Rf Magnetron Pecvd
Journal:Rare Metals
First Author:校外负责人
All the Authors:王琦,王美,费振义,李木森,XWFZR
Document Code:lw-168828
Volume:31
Issue:2
Page Number:198
Translation or Not:No
Date of Publication:2012-04
Release Time:2019-10-24