Title : Characterization and Analysis of Dlc Films with Different Thickness Deposited by Rf Magnetron Pecvd

Hits :

Affiliation of Author(s):材料科学与工程学院

Title of Paper:Characterization and Analysis of Dlc Films with Different Thickness Deposited by Rf Magnetron Pecvd

Journal:Rare Metals

All the Authors:XWFZR,wangqi,wangmei,feizhenyi,limusen

First Author:校外负责人

Indexed by:Unit Twenty Basic Research

Document Code:lw-168828

Volume:31

Issue:2

Page Number:198

Translation or Not:no

Date of Publication:2012-04-01