Project Name:石英芯片制备工艺研究
Institution:集成电路学院
Leading Scientist:王卿璞
Nature of Project:横向
Project Number:EF637AC831463165E053BE07C2CADB41
Date of Project Approval:2022-12-15
Scheduled Completion Time:2025-12-15
Date of Project Completion:2025-12-15
Date of Project Initiation:2022-12-15
Release Time:2024-04-16