Project Name:集成电路芯片制造中新型环保清洗技术及产业研发
Institution:物理学院
Leading Scientist:王卿璞
Supported by:08信息产业厅
Nature of Project:纵向
Project Level:Prefectural (City, Prefecture) Level
Project Participants:王卿璞,王卿璞,Li Yuxiang,Jianqiang Liu,肖洪地
Project Number:kyxm-4811
Project Approval Number:2008R0048
Date of Project Approval:2008-09-01
Scheduled Completion Time:2010-12-31
Date of Project Completion:2010-12-31
Date of Project Initiation:2008-09-01
Release Time:2019-04-17