Project Name:LPCVD工艺中SIPOS玻璃钝化芯片特性研究
Institution:集成电路学院
Leading Scientist:王卿璞
Nature of Project:横向
Project Participants:王卿璞,苏伟,徐明升
Project Number:9E84877886D701CBE053BE07C2CA2B19
Date of Project Approval:2019-12-16
Scheduled Completion Time:2022-12-16
Date of Project Completion:2022-12-16
Date of Project Initiation:2019-12-16
Release Time:2020-03-06