wangqingpu

Doctor

With Certificate of Graduation for Doctorate Study

山东大学

Personal Information:

Gender:Male
Date of Employment:1987-07-01
Business Address:高新区软件校区微电子学院3B202室
E-Mail:wangqingpu@sdu.edu.cn

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Home > Scientific Research > Paper Publications

A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

Date of Publication:2017-03-01 Hits:

Affiliation of Author(s):集成电路学院
Journal:IEEE Transactions on Nanotechnology
All the Authors:Yiming Wang,wangqingpu,xinqian,hanlin,Song A M
First Author:王汉斌
Document Code:E56E2B7ED1104702BAEB516FA27F194D
Volume: 16
Issue:2
Page Number:290
Translation or Not:no
Date of Publication:2017-03-01

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