Institution:新一代半导体材料研究院
Journal:JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
First Author:杨克建
Document Code:FE117A38C5F944CD8C6801A2AE654A2C
Issue:61
Number of Words:3
Translation or Not:No
Date of Publication:2022-10