Project Name:MEMS悬空膜结构传感芯片失效分析研究
Institution:微生物技术研究 院（微生物改造技术全国重点实验室）
Leading Scientist:王森
Nature of Project:横向
Project Number:31D7CDABB5EE2ED8E0635C00A8C00134
Date of Project Approval:2025-04-02
Scheduled Completion Time:2025-12-30
Date of Project Completion:2025-12-30
Date of Project Initiation:2025-04-02
Release Time:2025-04-08