山东大学教师主页王森 Structural and microstructural analyses of VO2 film grown on Si substrate by magnetron sputtering Home

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Structural and microstructural analyses of VO2 film grown on Si substrate by magnetron sputtering

Release Time:2020-08-07 Hits:

Institution:微生物技术研究院（微生物改造技术全国重点实验室）
Journal:Thin Solid Films
First Author:李小菊
Document Code:B5EA42B431EC421EBA5270159E1D7D03
Volume:709
Issue:138239
Page Number:1
Number of Words:4000
Translation or Not:No
Date of Publication:2020-07

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Structural and microstructural analyses of VO2 film grown on Si substrate by magnetron sputtering