Title:一种原位光辅助铜沉积光催化剂的制备方法及原子层沉积装置
Institution:晶体材料研究院（晶体材料全国重点实验室）
Type of Patent:Invent
Application Number:202210438733.8
Number of Inventors:8
Service Invention or Not:No
Application Date:2022-04-25
Publication Date:2023-05-30
Authorization Date:2023-05-30
Release Time:2023-06-27