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精密作动/感知双模式一体化的微机械梳齿结构及检测方法

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  • Title:精密作动/感知双模式一体化的微机械梳齿结构及检测方法

  • Institution:吉林大学

  • Type of Patent:Invent

  • State of Patent:Authorized patents

  • Authorization Number:ZL 2019 1 0789388.0

  • Service Invention or Not:No

  • Authorization Date:2022-05-24

  • Release Time:2024-10-31

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