Shoushui Wei
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Research Projects
Project Name:电子束曝光技术制作微系统器件掩模的研究
Institution:控制科学与工程学院
Supported by:科技厅
Nature of Project:纵向
Project Level:省、部委级
Project Participants:314000031920,Shoushui Wei,尹明,胡咏梅,杨立才,张明,孙晓军
Project Number:kyxm-5806
Project Approval Number:022090105
Date of Project Approval:2002-12-01
Scheduled Completion Time:2005-12-01
Date of Project Completion:2005-12-01
Date of Project Initiation:2002-12-01
Release Time:2019-04-18
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