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基体偏压对真空脉冲过滤弧沉积TiN涂层表面粗糙度的影响
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Affiliation of Author(s): : 机械工程学院

Title of Paper: : 基体偏压对真空脉冲过滤弧沉积TiN涂层表面粗糙度的影响

Journal: : 《工具技术》

All the Authors: : wufengfang

First Author: : wufengfang

Document Code: : lw-152812

Volume: : 44

Issue: : 8

Page Number: : 16

Number of Words: : 5

Translation or Not: : no

Date of Publication: : 2010-08-12

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Associate Professor
Supervisor of Master's Candidates

Gender : Female

Status : Employed

School/Department : 机械工程学院

Date of Employment : 1993-07-01

Business Address : 7号楼13-27

Contact Information : 13515412819

Email : wff2001@sdu.edu.cn

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