Research Projects

超临界二氧化碳微乳液在半导体纳米器件清洗技术中的应用

Release time::2019-04-18|Hits:

Affiliation of Participant(s):物理学院

Leading Scientist:Li Yuxiang

Supported by:08攻关三批

Nature of Project:纵向

Project level:省、部委级

Project Participants:Li Yuxiang,Li Yuxiang,xiaohongdi,Jianqiang Liu,zhaolili

Project Number:kyxm-3514

Date of Project Approval:2008-01-01

Scheduled completion time:2010-12-31

Date of Project Completion:2010-12-31

Date of Project Initiation:2008-01-01

Project Approval Number:8GG3003007