Research Projects

集成电路芯片制造中新型环保清洗技术及产业研发

Release time::2019-04-18|Hits:

Affiliation of Participant(s):物理学院

Leading Scientist:wangqingpu

Supported by:08信息产业厅

Nature of Project:纵向

Project level:地(市、州)级

Project Participants:wangqingpu,Li Yuxiang,Jianqiang Liu,xiaohongdi

Project Number:kyxm-4811

Date of Project Approval:2008-09-01

Scheduled completion time:2010-12-31

Date of Project Completion:2010-12-31

Date of Project Initiation:2008-09-01

Project Approval Number:2008R0048