Return Home
Research Projects
集成电路芯片制造中新型环保清洗技术及产业研发
Release Time:2019-04-18
  • Institution:
    物理学院
  • Leading Scientist:
    王卿璞
  • Supported by:
    08信息产业厅
  • Nature of Project:
    纵向
  • Project Level:
    Prefectural (City, Prefecture) Level
  • Project Participants:
    王卿璞,Li Yuxiang,Jianqiang Liu,肖洪地
  • Project Number:
    kyxm-4811
  • Project Approval Number:
    2008R0048
  • Date of Project Approval:
    2008-09-01
  • Scheduled Completion Time:
    2010-12-31
  • Date of Project Completion:
    2010-12-31
  • Date of Project Initiation:
    2008-09-01
Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University