Affiliation of Author(s):微电子学院
Journal:Materials Science in Semiconductor Processing
All the Authors:xiaohongdi,Feng Xianjin,Ma Jin
First Author:曹琼
Indexed by:Unit Twenty Basic Research
Document Code:3891A01B92C44DCAAD07D31EC88B3B5F
Volume:77
Page Number:58
Translation or Not:no
Date of Publication:2018-04-01