Affiliation of Author(s):微电子学院
Journal:Materials letters
All the Authors:xiaohongdi,Jianqiang Liu,liuxiangdong
First Author:曹得重
Indexed by:Applied Research
Document Code:87F8C72A5CC745D19A16418647BE1EF9
Volume: 209
Page Number:555
Translation or Not:no
Date of Publication:2017-12-15