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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

Release time:2019-06-06|Hits:

Affiliation of Author(s):微电子学院

Journal:Journal of Electronic Materials

All the Authors:maohongzhi,luancaina,Jianqiang Liu,Ma Jin

First Author:xiaohongdi

Indexed by:Unit Twenty Basic Research

Document Code:DBE67F01DB544898847C76A91BEC549C

Volume:48

Page Number:3036

Translation or Not:no

Date of Publication:2019-02-01

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Fabrication and properties of wafer-scale nanoporous GaN distributed Bragg reflectors with strong phase-separated InGaN/GaN layers
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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

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