Affiliation of Author(s):集成电路学院
Journal:Applied Surface Science
All the Authors:xiaohongdi,luancaina,pangzhiyong,Jianqiang Liu,Ma Jin
First Author:杨小坤
Document Code:3F506C1387FF47EFB4B03DC29105070E
Volume:489
Page Number:849
Number of Words:3
Translation or Not:no
Date of Publication:2019-09-30