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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM

Release time:2020-03-20|Hits:

Affiliation of Author(s):微电子学院

Journal:Journal of ELECTRONIC MATERIALS

All the Authors:maohongzhi,luancaina,Jianqiang Liu,Ma Jin,xiaohongdi

First Author:杨小坤

Indexed by:Applied Research

Document Code:9600585BF2564969BC16220CA429D8C2

Volume:48

Issue:5

Page Number:3036

Translation or Not:no

Date of Publication:2019-05-01

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