Ta-doped epitaxial beta-Ga2O3 films deposited on SrTiO3(100) substrates by MOCVD

Release time:2021-05-28|Hits:

Affiliation of Author(s):集成电路学院

Journal:Materials Science in Semiconductor Processing

First Author:王迪

Document Code:F3B06BABF3F4429293F2971F17DBB39E

Volume:128

Number of Words:5

Translation or Not:no

Date of Publication:2021-06-15