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Preparation and properties of heteroepitaxial beta-Ga2O3 films on KTaO3 (100) substrates by MOCVD
Release Time:2021-06-01
  • Institution:
    集成电路学院
  • Journal:
    MATERIALS CHARACTERIZATION Journal
  • First Author:
    王迪
  • Document Code:
    3B08BF7E953F4E09831216E84A5AC61A
  • Volume:
    165
  • Number of Words:
    5
  • Translation or Not:
    No
  • Date of Publication:
    2020-07
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