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Preparation and properties of heteroepitaxial beta-Ga2O3 films on KTaO3 (100) substrates by MOCVD

Release time:2021-06-01|Hits:

Affiliation of Author(s):集成电路学院

Journal:MATERIALS CHARACTERIZATION Journal

First Author:王迪

Document Code:3B08BF7E953F4E09831216E84A5AC61A

Volume:165

Number of Words:5

Translation or Not:no

Date of Publication:2020-07-01

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