Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)

Release time:2022-12-17|Hits:

Affiliation of Author(s):集成电路学院

Journal:Journal of Materials Science-Materials in Electronics

First Author:马瑾

Document Code:82B66AFBC45F46DE928D3AE918047B0B

Issue:33

Number of Words:4

Translation or Not:no

Date of Publication:2022-01-18