Project Name:6英寸半绝缘4H-SiC 衬底材料的开发技术项目
Institution:新一代半导体材料研究院
Leading Scientist:彭燕
Nature of Project:横向
Project Participants:徐现刚,谢雪健
Project Number:A7396A0B419903D6E053BE07C2CA1BEB
Date of Project Approval:2020-03-16
Scheduled Completion Time:2021-03-16
Date of Project Completion:2021-03-16
Date of Project Initiation:2020-03-16
Release Time:2020-06-09