Affiliation of Participant(s):新一代半导体材料集成攻关大平台
Leading Scientist:pengyan
Type of Project:研究与发展成果应用
Nature of Project:横向
Project Participants:xuxiangang,xiexuejian
Project Number:A7396A0B419903D6E053BE07C2CA1BEB
Date of Project Approval:2020-03-16
Scheduled completion time:2021-03-16
Date of Project Completion:2021-03-16
Date of Project Initiation:2020-03-16