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锗氮共掺碳化硅晶体杂质浓度表征及其电学性质研究

Release Time:2019-10-22 Hits:

Institution:晶体材料研究所
Journal:无机材料学报
Key Words:物理气相传输法;;Ge掺杂;;晶格匹配;;欧姆接触;;迁移率
First Author:李天
All the Authors:杨祥龙,谢雪健,肖龙飞,徐现刚,胡小波,陈秀芳
Document Code:76917
Issue:05
Translation or Not:No
Date of Publication:2018-04