Project Name:高品质光刻胶及光刻工艺研究

Institution:国家胶体材料工程技术研究中心

Leading Scientist:Wenbing Kang

Supported by:2019 Shandong Provincial Key R&D Program (Competitive Selection Category of Major Scientific and Technological Innovation Engineering)

Nature of Project:纵向

Project Level:省、部委级

Project Participants:Wenbing Kang,王文寿,Xu Wang,占金华,辛霞,夏玉国

Project Number:9A840AD87EE42C8FE053BE07C2CACACD

Project Approval Number:2019JZZY020229

Date of Project Approval:2019-11-21

Scheduled Completion Time:2021-12-31

Date of Project Completion:2021-12-31

Date of Project Initiation:2019-01-01

Release Time:2019-12-28