Title of Project : 高品质光刻胶及光刻工艺研究

Hits :

Project Name:高品质光刻胶及光刻工艺研究

Affiliation of Participant(s):国家胶体材料工程技术研究中心

Leading Scientist:Wenbing Kang

Supported by:2019年山东省重点研发计划（重大科技创新工程竞争择优类）

Type of Project:研究与发展成果应用

Nature of Project:纵向

Project level:省、部委级

Project Participants:Wenbing Kang,wangwenshou,Xu Wang,zhanjinhua,xinxia,xiayuguo

Project Number:9A840AD87EE42C8FE053BE07C2CACACD

Date of Project Approval:2019-11-21

Scheduled completion time:2021-12-31

Date of Project Completion:2021-12-31

Date of Project Initiation:2019-01-01

Project Approval Number:2019JZZY020229